1200°C Vertical PECVD Furnace With RF Generator, Gas Mix & Pumping System

1200°C Vertical PECVD Furnace With RF Generator, Gas Mix & Pumping System

 

TMAX-1200-PECVD series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.

All our furnaces are CE compliant.

Features

·        Compact, portable and lightweight design.

·        Lower processing temperatures required compare to conventional CVDs.

·        Film stress can be controlled by high/low frequency mixing techniques.

·        Split furnace chamber for fast and easy tube access.

·        Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.

·        Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.

·        Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)

·        Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.

·        Built-in computer interface.

·        Long life type K thermocouple.

·        Slidable furnace option gives you ultra fast cooling rates

Furnace, vacuum pump and gas mixing system specifications

 RF generator specifications