1200C Three Zones CVD Tube Furnace With 4 Channel MFC Gas Station

Model Number:: TMAX-3-1200
Compliance:: CE certificate
Warranty:: Two Year Limited Warranty With Lifetime Support
Payment:: T/T, Credit Card, Paypal, LC, Western Union
Delivery Time:: 3 Days

Email:: David@battery-equipments.com
WhatsApp:: +8618659217588
WeChat:: 18659217588

Product Description

1200C Three Zones CVD Tube Furnace With 4 Channel MFC Gas Station

The TMAX-3-1200 series furnace workstation consists of three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.

Specifications

tube furnace	Casing	Double layer steel casing with air cooling. Built-in thermostat to control Cooling running automatically when case > 55°C.
	Processing Tube	Material: Fused quartz tube
	Thermal Bloc Placement
	Power	7KW
	Rated Voltage	AC 208-240V Single phase, 50/60Hz
	Heating Element	Fe-Cr-Al Alloy doped by Mo
	Working Temp.	Max. Heating Temp.: 1200°C Continuous Working Temp.: 1100°C
	Heat-up Rate	Heat-up rate: 1~20°C/min programmable
	Heating Zone Length	Total heating zone: 900mm (300mm + 300mm + 300mm)
	Temp. Controller	Three precision temperature controllers to control three zones separately. PID automatic control with 30 steps programmable segments. Temperature accuracy: ±1°C Thermocouple: K type built inside the furnace
	Vacuum Seal	One pair of stainless steel vacuum flange with: - one mechanical pressure gauge - two needle valves - one KF-40 connector for the high vacuum station.
	Rated Voltage	AC 208-240V Single Phase, 50/60Hz
	Dimension	1100(L) x 450(W) x 670(H), mm
High Vacuum Station	Structure	Mobile cart size: 600 (L) x 600 (W) x 700(H), mm Max. Loading: 600 Lbs on top Molecular pump control Panel : LCD digital Inside: Pfeiffer vacuum pump made in Germany Vacuum sensor is included
	Volume Flow Rate	Nitrogen N2 33 L/s Helium He 39 L/s (2340L/minute) Hydrogen H2 32 L/s
	Working Range	From 1000 mbar to <1E-7 mbar
	Ultimate Pressure	<1E-8 mbar (without any leaking )
	Voltage & Power	110VAC or 220VAC, 110W
Mass Flow Gas Control	Structure	2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software LED display 4 channel MFC Made of 316 stainless steel with gas flow range as below: Controller 1: 0~100SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM 4 Channel gas go through a Gas mixing tank: Φ80X120mm Dimension: 600(L) x 745(W) x 700(H), mm
	Power	18W
	Rated Voltage	AC 208-240V, Single phase, 50/60Hz

Shipping & Warranty

Shipping Dimension	Total Three Pallets （ #1: 60" x 45" x 40" #2: 48" x 40" x 42" #3: 48" x 40" x 42" ）
Shipping Weight	850 lbs
Warranty	Two years limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance	CE Certified All electric components ( >24V) are UL / MET / CSA certified The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks