Programmable Vacuum Chuck Spin Coater (500-6000 Rpm, 8" Wafer Max) With Optional Heating Cover

Structure

• Aluminum casting case to keep spinning stable.
• Drainage outlet and vacuum pump connector are on back panel.
• One filter is included in standard package. It is used to connect the pump and coater for preventing

waste water from flowing into the pump.

• One oilless pump is included in the standard package.

Chamber &

Vacuum Chuck

• Chamber diameter is 250 mm, and can accept wafer 8" Dia max. or 5"x5" square.
• Spinning chamber is made of PP which is corrosive resistant .
• One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers.
• 1 piece of Adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates or

wafer with size < 6.

Spin Speed

• Digital control panel with two programmable segments of different spin times and speeds.
• 500 - 6000 RPM adjustable spinning speed for each segment.

Liquid Injecting

• 20mL syringe is used to contain the coating material.
• The syringe holder height can be adjusted and rotated freely along the support rod.

Optional

• You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating.
• Using plasma cleaner to treat substrate surface before coating can improve film quality.
• You may consider our new product: Heatable syringe .
• Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available.

• Heating cover with digital temperature controller up to 100°C (max. duration < 1 minute) is available at extra

cost  ($2495) , which allows sample drying in-situ during and after coating. Click demo video below for detail.

Input Power

• AC 110V/220V selectable.
• There is a built in power socket on the right side of the  VTC-200 spin coater. It is used to supply power for

the vacuum pump. The output voltage of this power supply depends on the input voltage of the spin coater's

main circuit. (e.g. if the spin coater is plugged into the AC 110V power socket, then the built in power

socket will supply AC 110V).

Motor Power

90VDC , 150W

Product Dimensions

500mm(L) x 400mm(D) x 400mm(H)

Net Weight

20 kg (44 lbs)

Compliance

• CE Certified
• NRTL certification is available upon request at extra cost  ( Please notice us before ordering

if you need NRTL )

Warranty

• Two years limited with lifetime support.
• Rusting and damage due to improper storage condition or maintenance are not covered by warranty.