Product Description

Laboratory High Vacuum Coater Thermal Evaporation Carbon Coating Machine for Photovoltaic Industry


Model: SD-100AF

Technical specifications

Vacuum Pump (Oil required) Rotary Vacuum Pump
Rotary Pumping Speed 50 Hz: 16 m3/h (4.4 L/s) / 60 Hz: 19.2m3/h (5.2 L/s)
Turbo Molecular Pumping Speed 600 L/S
Vacuum Limit 5x10-4Pa
Max Evaporation Current 100A
Working Pressure 5x10-3Pa
Vacuuming Time 5 Min ( 2 Pa )
Vacuum Measure Measuring range from atmosphere to 1x10-5 pa
Chamber Size (p250*300mm(height) Scratch Resistant Quartz Glass
Evaporation Target Source Target material: Carbon Rod ((p5mm) / Target source: Carbon Rod
Operation Method Instruction Manual

battery equipment

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