Small Spin Coater ( Max. 8000 Rpm, 4" Wafer Max.) With 3 Sets Of Vacuum Chucks & Complete Accessories

Structure

• Aluminum casting case to keep spinning stable
• Liquid disk made to resist most of the corrosive solutions
• Drainage outlet and vacuum pump connector are on back panel
• One filter is included in standard package. It is used to connect the coater for preventing waste

water flowing into the pump

• One oil-less vacuum pump is included in the standard package, please click here for specification details.

Chamber  & Vacuum Chuck

• Chamber Diameter: 145 mm
• 3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'' and 4'')
• 1 piece of adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates

(e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)

• Mini suction cups are available for the small wafer with less 1" Dia. or substrate with regular

( 5x5, or 10x10mm) or irregular shape.

Vacuum Pump

• Vacuum grade rubber pipe is included for immediate use

Spin Speed & Time

• Digital control panel with TWO programmable segments for different spin times and speeds
• Spinning speed: 500 - 8000 RPM
• Spinnning Time: 1 - 60s

Liquid Injecting

• 20mL syringe is used to contain the coating material
• The syringe holder height can be adjusted and rotated freely along the support rod

Optional

• You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating
• Using plasma cleaner to treat substrate surface before coating can improve film quality
• You may consider our new product: Heatable syringe
• Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available

Input Power

110VAC or 220VAC please select the voltage in options bar (10A fuse)

Motor Power

24V DC motor  with 150W Max.

Product Dimensions

13''(L) x 10''(W) x 8.5''(H)

Net Weight

15 kg (33 lbs)

Compliance

• CE Certified.
• NRTL certification is available upon request at extra cost  ( Please notice us before ordering if you need NRTL ).

Warranty

• Two years limited with lifetime support.
• Rusting and damage due to improper storage condition or maintenance are not covered by warranty.

Shipping Weight

Application Notes

• Please clicks here to review an article on "Spin Coater Theory and Processing".
• In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner

(click the pictures below for more details) prior to coating. This will significantly reduce the surface

tension on the substrates.

• Cleaning instruction for the spin coaters.
• You may consider our new product: Heatable syringe and spin coater with heatable cover.
• Strongly suggest you put the coater under a fume hood as below right.
• When using the coater in glovebox with Ar gas, vacuum pump must put in outside the glovebox

via vacuum feedthrough or adaptor.

Warnings

• Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the

motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.

• If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing

during the operation.

• For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.

Shipping Dimensions

40"(L) x 28"(W) x 24"(H)

Shipping Weight

46 kg (100 lbs)