1200C Single Heating Zone Rotary PECVD Tube Furnace (60 Mm OD)

Power

3.5 KW

Tube Size

 Dia 60(OD) X1200mm

Product Dimensions (mm)

1300x420x1200

Tube rotating Speed

0 - 25 RPM variable

Furnace tilt angle

-10 - 30°

Features

1.     Two programmable precision  temp. controllers with 30 segments.

2.     Two separately controlled Heating Zones:

1. • 200mm length for each heating zone
   • 400mm total in heating length
   • 250mm constant central temperature heating area if both zones were heated at the same temperature

Furnace Structures

1.     Split tube furnace with sliding rail

2.     Max 1150ºC for continuous heating

3.     Multi-programmable precision digital temperature controllers with 30 segments.

4.     Input power: 208 – 240V AC input, single phase at max. 4KW

Plasma RF Power Supply

1.     Output Power:           5 -500W adjustable with ± 1% stability.

2.     RF frequency:           13.56 MHz ±0.005% stability.

3.     Reflection Power:       10W max.

4.     Matching:                  Automatic

5.     RF Output Port:         50 Ω, N-type, female

6.     Noise:                       <30 dB.

7.     Cooling:                     Air cooling.

8.     Power:                      208-240VAC, Single Phase, 50/60Hz

Anti-corrosive Pressure Gauge

1.     3.8x10-5 to 1125 Torr measurement range

2.     Anti-corrosive, gas-type independent

3.     High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

4.     Fast atmospheric detection eliminates waiting time and shortens process cycle

5.     Easy to exchange plug & play sensor element

Vacuum Pump Station and Valves

1.     Pfeiffer's High Speed ( 120L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy duty mobile cart

2.     KF25 adapter and stainless steel pipe are connected between pump and tube flange with ball valve for customer's plug and play

3.     10E-2 Torr vacuum can be achieved inside processing tube

Mass Flowmeters & Gas Mixing Station

It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.  LCD touch screen is integrated to provide easy control on the gas flow rate of each independent channel.

1.     Working Temperature: 5~45 ºC

2.     Max. Pressure: 3x106 Pa

3.     Accuracy: ±1.5% FS

4.     Liner: ±(0.5-1.5)%F.S.

5.     Duplicate accuracy: ±0.2%F.S.

6.     Controlling Range: 5,10,20,30,50,100,200,300,500SCCM or 1,2,3,5,10SLM.

Heating & Cooling Rates

• • RS485 port and software are installed and allow remote control temperature profile by PC.
  • In order to achieve Max.heating rate,  the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
  • In order to achieve the Max. cooling rate, move the heated furnace from hot zone to cold zone

Warranty

Two years limited warranty with lifetime support.

Application Notes

Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube.
Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C.
For operating PECVD system with tube size larger than 4", please always keep more than 1-meter distance from the plasma source after the plasma generator starts working.