RF Generator For 50, 80 and 125 Mm OD Tube Furnaces

Model Number:: TMAX-RF
Compliance:: CE certificate
Warranty:: Two Year Limited Warranty With Lifetime Support
Payment:: T/T, Credit Card, Paypal, LC, Western Union
Delivery Time:: 3 Days

Email:: David@battery-equipments.com
WhatsApp:: +8618659217588
WeChat:: 18659217588

Product Description

RF Generator For 50, 80 and 125 Mm OD Tube Furnaces

The PECVD system is composed of tube furnace, quartz vacuum chamber, vacuum system, gas supply system and rf power supply system.Mainly used in: metal film, ceramic film, composite film, graphene and other growth.It is easy to increase the function of plasma cleaning etching and etching.The PECVD system has advantages of high deposition rate, good uniformity, consistency and stability.

Power output range	0-500W
Maximum reflected power	200W
working frequency	RF：13.56MHZ±0.005%
Pw stability	+/-0.1%
harmonic component	≤-50dbc
Rf width	0-600mm adjustable
Matching mode	AUTO
Cooling mode	air cold
Noise	<50dB
RF interface	50Ω N-type
Input power	208-240V 50/60HZ