1100C RTP Tube Furnace System With Turbomolecular Vacuum Station & Complete Acessories

Furnace

structure

Compact 4“ RTP Tube Furnace（Double layer steel case mullite liner)

Heating element

8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Working Temp.

1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )

Max heating rate

50°  C/sec

Max cooling rate

64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure)

Heating zone

12" length with 4" constant temperature zone within +/-1°C uniformity

Program Temp. Controller

• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Please click here to learn why SCR is more accurate than SSC (Solid state relay).
• Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
• Over temperature protection and alarm allows for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.
• PC Control:
  • A MTS-02 control module is included for PC control on this furnace.
  • The new version of PC module is now compatible with Lab View 05/08/2014
  • A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.

Quartz Tube & Sample Holder

• Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length
• 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
• One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
• AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
• The sample holder is removable from flange

Vacuum flange

KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.

Water Cooling Jacket

• Cooling water is required.
• Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
• We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min

Power input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)

HV Station
High Vacuum Station

Structure

• Mobile cart size:  600 (L) x 600 (W) x 700(W), mm
• Max. Loading:       600 Lbs on top
• Molecular pump control Panel :   LCD digital
• Diaphragm Pump and  Turbo Molecular Pump are installed inside the steel case.

Vacuum Degree

6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)

Control panel

• One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
• System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
• Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum.

• LCD screen - double lines parameters checking interface make the working easier to be handled.

                                                 

Start-up time

2 minutes

Backing Pump Volume Flow Rate at 10 mbar

3.8 L/min for 50Hz and 4.4 L/min for 60Hz

Power input

110V AC or 220V AC switchable, 50/60Hz

Power consumption

Duration/Max power: 100/110Watt

Shipping Info

Weight and Dimension

RTP furnace: 110 lbs,  760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs,  600 x 600 x 700mm (24" x 24" x 28") L x W x H

Warranty

Two years limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)

Laptop, software & WiFi Control (Optional)

• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
• A wireless remote control provides up to 300 meters operating range.

• Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

    

Compliance

• CE Certified
• The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information.
• Temperature controller is MET and CE Certified
• High Vacuum Station is TUV Certified