Product Description

1000°C Max Slideable RTP (4'' OD) Tube Furnace with Rapidly Heating & Cooling

 

TMAX-1200X-RTP-4-SL is an RTP (4'' OD) furnace with Infrared Light Heating and Slide Cooling. It is capable of achieving a max. heating rate > 50°C/s  and a cooling rate  > 10°C/s. The furnace is designed for growing graphene and carbon nanotubes by CVD.

SPECIFICATIONS

Furnace Structure

  • Double layer steel
    casing with air cooling keeps furnace surface temperature lower than
    60°C.
  • One set of sliding
    rails is installed which allows furnace move from one side to the
    other side automatically at variable speeds using the control knob.
  • Vacuum flanges and the digital
    vacuum gauge are installed for immediate use.

Power

9KW

Voltage

AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

  • 1000°C (<1 hour)
  • 800°C (<2 hours)
  • 600°C
    (continuous)

Note: RTP furnaces should not be heated for long durations due to
thin refractories.

Temperature Accuracy

+/ - 2°C

Max. Heating Rate

50  ºC/s

Max. Cooling Rate

Cooling Rate from 900~200C:

8.3°C/sec (900 - 600°C);

4.4°C/sec (600°C - 500°C);

2.8°C/sec (500°C - 400°C);

1.6°C/sec (400°C - 300°C);

0.9°C/sec (300°C - 200°C);

Process Tube Size

High purity fused quartz tube
Ø4" OD x 1400mm L

Sliding Rails / Table

  • Dual sliding rails made
    of Cr plated steel
  • Sliding rail length:
    1200 mm
  • Driven by DC motor

Sliding Control

Automatic sliding is controlled by the temperature controller.
When the heating program is finished, the furnace will slide from right
to left at the set speed. Air fans will blow heated area to achieve fast
cooling.

  • Sliding Range: 340mm
  • Sliding Speed: 0-70
    mm/s; adjustable

Heating Elements

8 pcs Paralleled Infrared Heating  ( 1200w each)

Thermocouple

K type, 1/4" Dia x 24" length

Temperature Controller

  • PID automatic control
    with 30 programmable segments for precise control of heating rate,
    cooling rate and dwell time.
  • Built-in overheating
    & thermocouple broken protection.
  • Over
    temperature protection and alarm allows for
    operation without attendant(s).
  • +/- 1 ºC temperature
    accuracy.
  • RS485 Communications
    Port.
  • PC Control:
    • An MTS-02 control
      module is included for PC control on this furnace.
    • The new version of PC
      module is now compatible with Lab View 05/08/2014
    • A laptop PC can be
      ordered for $500 together with the furnace. We recommend ordering a
      computer (laptop) from us to avoid software installation problems
      as we will perform installation and testing before shipping.

Vacuum Flanges

Stainless steel vacuum flanges are installed on both ends of the tube.

Right flange:

  • Hinge-type flange for
    easy sample loading
  • 1/4"diameter
    feedthrough for inserting  K-type thermal couple
  • Needle valve with barb
    gas fitting is built in

Left flange:

  • Digital vacuum gauge is
    included
  • KF25 right angle valve
    is installed for connecting to a vacuum pump
  • Needle valve for vacuum
    release is included

Vacuum Level

 Limited by vacuum pump

  • 10^-2 torr can be
    achieved by mechanical pump
  • 10^-4 torr can be
    reached by molecular pump
  •  

 Vacuum pump is not included, please order separately at related
products section

Flow Meter

 One flow-meter is built in with range: 16-160 ml/min

Dimensions

  • 460 x 330 x 520
    mm ( furnace only)
  • 1800 x 450 x 680
    mm ( furnace + sliding)
  • (click to enlarge the
    picture)

Net Weight

~ 80 Kg

Shipping Package Size

74" x 39" x 45"

Shipping Weight

300 lbs

Warranty

Two years limited manufacturer's warranty (Consumable parts such as
processing tubes, o-rings and heating elements are not covered by
the warranty, please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

  • Brand new laptop with
    Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
    immediate use.
  • Labview Based
    Temperature Control System enables user to edit
    temperature profile, manage heat-treatment recipe, record and plot data
    for MTI furnaces.
  • A wireless remote
    control provides up to 300 meters operating range.
  • Above features are
    available upon request at an extra cost (up to $1,000). Please contact
    us for more information.
  • Note:
    The software is only compatible with MTI’s Yudian Temperature
    Controller

Compliance

  • CE Certified
  • All electric components
    ( >24V) are UL / MET / CSA certified
  • The furnace is ready
    to pass TUV(UL61010) or CSA certification at extra cost.

Application Notes

  • Tube furnaces with
    quartz tubes are designed for using under vacuum and low pressure <
    0.12 MPa (absolute pressure).
  • Attention: A two-stage
    pressure regulator must be installed on the gas cylinder to limit the
    pressure to below 3 PSI for safe operation.
  • The flow rate for
    gasses should be limited to < 200 SCCM (or 200 ml/min) for
    reducing thermal shocks to the tube
  • Vacuum limit definition
    for all quartz tube furnaces: * Vacuum pressures may only be safely used
    up to 1000°C
  • Quartz tubes should be
    replaced after every 10th use to ensure the best performance.

tube furnace

Slideable RTP Furnace

battery equipment

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